Human beings entered the 21st century and entered the information age in an all-round way. In a certain sense, they entered the era of sensors. In the modern control system, the sensor is in the position of the interface connecting the object to be tested and the test system, and can directly or indirectly contact the object to be measured. It is the "window" of information input, the eye of the Internet of Everything, and the only functional device for data information acquisition.
Directly influence and determine the performance of the system. In particular, the current international Internet of Things, big data, cloud computing technology, and even the realization of various technologies in smart cities, the dependence on sensor technology is particularly prominent.
Standard disputed sensor
At present, there are about 26,000 kinds of sensors for global productization. Due to the lack of guidelines and norms for the development of international standards, no authoritative sensor standard types have been developed. Its sensitive mechanism, sensitive materials, use functions, application fields, etc. are intertwined and deeply integrated. It is difficult to clarify.
The debates on standards and divisions between countries and industries have never stopped. They have their own opinions and arguments, resulting in chaotic product names, various types and structures. Complex, complex parameters and other complex conditions. Currently, the industry can only be divided into large categories such as simple physical sensors, chemical sensors and biosensors.
Due to the sensitive mechanism, sensitive materials, industrial scene environment, use scenes, and the characteristics of the detected medium and individualized parameters, the structure is complex, and the sensor has been in a variety of varieties and small batch production for a long time. Constrained by factors such as the dispersion of process technology, the complexity and the high cost of equipment and equipment, the industry claims that its production process is to manufacture "industrial crafts." Engineers and technicians from all over the world have developed long-term technology development and innovation in product standardization, performance normalization, functional integration, structural standardization, and industrialization of process equipment and fixtures. A large number of different technical achievements.
MEMS technology is the source of innovation
In the field of Silicon Valley sensors in the United States, based on MEMS process technology, various sensor product innovations of different package structures have been developed according to the needs of different industries and functions. It has been used for nearly 25 years to form various types of sensor products, and the application fields are expanding. , has been widely recognized by various industries. As Dennis, founder of Silicon Valley MEMS process technology, said: "For more than 20 years,
Silicon Valley sensor products have been around the market for MEMS chips based on silicon-based materials and market applications in different industries, and product innovation in different structural forms." . Therefore, MEMS process technology is the common basic process technology of various types of sensors, and is called the source of sensor innovation by the industry.
Currently, MEMS mature processes are 4 inches, 6 inches, 8 inches, 12 inches. Along with the upgrading and upgrading of semiconductor planar technology, the level of maturity of process equipment and equipment is increasing, the price is continuously decreasing, and the MEMS process is also developing toward a larger size, and the process maturity is also increasing. The products are widely used in physical, chemical and biological sensors, and have been matured in sensors such as sound sensitive, photosensitive, heat sensitive, force sensitive, magnetic sensitive, gas sensitive, moisture sensitive, pressure sensitive, and ion sensitive. It not only improves the industrialization ability, reduces the product cost, but also greatly improves the reliability, stability and consistency of the product, which greatly improves the dispersion and dispersion of the product, and can be standardized and standardized for packaging and production. , played an important role in mass production and large-scale production.
In 2011, the US industry believes that the MEMS process is mature and can be widely promoted and applied. It has established and formed the innovation and breakthrough of the sensor industry in the two major directions of MEMS process technology and application: First, sensitive mechanism innovation and technological breakthrough. Improve the basic theory and application level of MEMS process technology in materials and process structure, such as in crystal and amorphous, various semiconductor materials; in silicon-silicon bonding process, silicon film process, metal film process, etc. Process technology innovation has greatly improved the industrialization basic level of miniaturization, low cost, compound type and integration of product production. The second is the improvement of intelligence level and application innovation. Innovations and breakthroughs have been formed in multi-functional integration, modular architecture, embedded capabilities, and networked interfaces.
At present, there are about 26,000 kinds of sensors for global productization. Due to the lack of guidelines and norms for the development of international standards, no authoritative sensor standard types have been developed.